Date: April 16(Wed.)-18(Fri.), 2025.
Venue: Annex Hall, PACIFICO YOKOHAMA, Yokohama, Japan
What's New!
Topics
You are requested to choose topic applicable to your abstract from among the items listed in the Themes and Topics below.
1. Materials for photomasks
2. Fabrication process steps and equipment for photomasks
3. Photomask writing tools and technologies including multi-beam EB writer
4. Tools and technologies for metrology/ inspection/ repair
5. Technologies and infrastructures for EUVL masks
6. Technologies and infrastructures for NIL masks
7. Technologies and infrastructures for FPD masks
8. EDA, MDP, Curvilinear ILT and DTCO
9. Photomasks with RET: PSM, OPC, SMO and multiple patterning
10. Photomask-related lithography technologies
11. NGL mask technologies and their applications: DSA and others
12. Strategy and business challenges: cost, cycle time and total mask solutions
13. Patterning technologies for semiconductor and electronic devices
14. Semiconductor manufacturing technologies
15. Advanced package, Chiplets
16. eBeam direct writing and eBeam lithography technologies
17. Utilizing AI technologies for the efficiency of R&D and HVM
18. Legacy tools for middle and low-end masks
19. Photomask and lithography related technologies in academia
Program Summary of Past PMJs (Written in Japanese)
PMJ2024学会報告 PMJ2023学会報告 PMJ2022学会報告 PMJ2021学会報告 PMJ2019学会報告
Photomask Japan 2025 is the 31st international symposium on photomasks and NGL masks in Japan. The aim of the symposium is to bring together engineers and investigators from Japan, USA, and all over the world in the field of photomasks, NGL masks, and related technologies to discuss recent progress, applications, and future trends. The conference program will feature invited papers, contributed papers, poster sessions, and a rump session with panel discussion.
Photomask Japan Secretariat
c/o PCO Co., Ltd.