Session 2
Session 6
Session 13
Invited speakers
Session 1
Exploring Innovative Absorber Materials for EUV Masks
Kazunori Seki (Tekscend Photomask Corp.(Japan)
Session 3
Manufacturing Transformation Era: Process Solution Technologies for Panel-Level Packaging Based on Wafer-Level QualityRyoya Kitazawa (ULVAC.Inc, Japan)
Manufacturing processes, photomasks, and panel specification requirements for ultra-high PPI VR displays on glass substrates
Charles Annis (Omedia, Japan)
Session 4
13th eBeam Initiative Annual Luminaries Survey Predicts Photomask Market and Equipment Growth
Aki Fujimura (D2S,Inc, U.S.A)
Session 5
Revealing High-NA Mask Phase-Effects by AIMS(R) EUV Metrology
Matthias Roesch (Carl Zeiss SMT GmbH, Germany)
Session 6
Update on eBeam Multigon Format Optimizations
Kokoro Kato (Synopsys, Japan)
Session 7
Latest developments on CNT pellicles for high power EUV lithography
Takeshi Kondo (LINTEC OF AMERICA, INC., Japan)
Session 9
History and future outlook for advanced EB resist development
Kei Yamamoto (FUJIFILM Corporation, Japan)
Session 10
Intel is paving the way to State-of-the-art Anamorphic High-NA EUV Mask Manufacturing and Lithography
Safak Sayan (Intel Corporation, U.S.A)
Session 11
Advanced Mastering Technology enabling future Optical Designs
Bríd Connolly (Tekscend Photomask Company, Germany)
Metastructures and the Advanced Mask Pipeline: Unlocking the Future of AR
Bo Zhao (Meta, U.S.A)
Session 13
Semiconductor photomask technology and mask writer market
Vishal Saroha (Yole Group, France)
Session 14
Model for EUV Multilayers:Quantified Intermixing via the Effective Medium Approximation
Seulki Roh (Samsung Electronics Co.,Ltd., Republic of Korea)
New EUV mask and blanks for DRAM 1a nm and beyond
Hiroshi Hanakawa (AGC Inc., Japan)
Reducing Overlay Impact On High Power EUV Scanners Through Optimizing Reticle Substrate Thermal Properties
Rick Jansen (ASML Netherlands B.V., Netherlands)
Session 15
Stitching at resolution for High NA: an experimental process window study
Lieve Van Look (Imec, Belgium)
Session 17
Latest Advances in Multi-Beam Mask-Writing
Christoph Spengler (IMS Nanofabrication GmbH, Austria)