Keynote Speaker


Session 6:Opening Session Day 2 / Keynote, Mas Market and Logistics

Chan-UK Jeon

The 2nd wave of EUV Mask Manufacturing in AI era

Chan-UK Jeon, Tekscend Photomask (formerly Toppan), Japan

Biography

Personal History:

Chan-Uk Jeon joined Tekscend Photomask Corp. (formerly Toppan Photomask) in 2021 and is currently working as the CTO. With over 35 years of experience in photomask engineering, he has held significant leadership roles, particularly in managing the development of diverse process technologies, with a focus on leading-edge EUV masks. Before joining Tekscend, he served as Vice President and Team Leader of the Mask Development Team at Samsung Semiconductor R&D Center. During his tenure at Samsung, he was dispatched to SEMATECH as program manager of the Mask Blank Development Center (MBDC, NY), where he played a key role in the early development of defect-free EUV blank mask. He received a B.S. degree in electrical engineering from Yonsei university in 1990 and was granted an honorary doctorate degree (2013) from Samsung Electronics. Since 2023, he has been a member of the program committee for SPIE Advanced Lithography.

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