Call for Papers

Important Dates

Abstract submission open: December 2023

Abstract submission deadline: May 3, 2024 May 17, 2024

Notification of acceptance: July 2024

List of the IIT 2024 Scope

  • Doping by implantation, epitaxial and alternative processes
  • Annealing processes
  • Device applications (Logic, memory, power devices, image sensors, RF, etc…)
  • Equipment
  • Metrology
  • Modeling and simulation
  • Emerging technology
  • Smart factory (Intelligent manufacturing, AI/ML analysis)
  • Sustainability and environmental preservation
  • Fundamentals and ion-solid interaction
  • Material science (Modification, AI/ML analysis)


IIT 2024 offers 3 awards as below.
Presenters can apply for both the student award and the young researcher award at the same time.
  • Student Award
  • *Please upload your Student ID when applying for this award
  • Young Research Award (Under the age of 40)
  • Best Poster Award

Abstract Submission

  • Your preference for the presentation form (oral or poster) will be selected, and the final program will be decided by the Program Committee. While we strive to accommodate preferences, we appreciate your understanding if we cannot meet all expectations.
  • All registrations can only be submitted with the online submission system by the first author, registrations sent by e-mail, fax or post will be ignored.
  • The one-page abstract must be prepared in English and submitted as a PDF file, please use the template attached below.

Click here for the submission guideline

*You will not receive an email from the system for confirmation of submission.
*Please go to your "my page" and confirm that the status shows as "Submitted".
*You can edit and make changes to the submitted content within the submission period.