COMMITTEES

Conference

  • Chair: Hitoshi Wakabayashi (Tokyo Institute of Technology)
  • Treasurer: Yoji Kawasaki (Sumitomo Heavy Industries Ion Technology Co., Ltd.)
  • Sponsorship: From academia
  • Publicity: Takashi Kuroi (Nissin Ion Equipment Co., Ltd.)
  • School: Jiro Matsuo (Kyoto University)
  • Excursion/banquet: Satoshi Shibata (Panasonic Operational Excellence Co., Ltd.)

    • Technical Program

  • Chair: Hitoshi Wakabayashi (Tokyo Institute of Technology)
  • Publication Chair: Hitoshi Wakabayashi (Tokyo Institute of Technology)
  • Vice-Chair: Nariaki Hamamoto (Nissin Ion Equipment Co., Ltd.)

  • Masayoshi Hino (Axcelis)
  • Ryo Hirose (SUMCO CORPORATION)
  • Yasushi Hoshino (Kanagawa University)
  • Fumihiro Inoue (Yokohama National University)
  • Tsuyoshi Ishikawa (KOKUSAI ELECTRIC)
  • Hiro Ito (Applied Materials)
  • Masashi Kato (Nagoya Institute of Technology)
  • Takamasa Kawanago (Tokyo Institute of Technology)
  • Rikuto Kihara (MIRISE Technologies Corporation)
  • Yoshiaki Kikuchi (Sony Semiconductor Solutions Corporation)
  • Kazunari Kurita (SUMCO CORPORATION)
  • Yasuhiko Matsunaga (Axcelis)
  • Hideaki Minamigawa (ION TECHNOLOGY CENTER Co., Ltd.)
  • Ryuichi Miura (Applied Materials)
  • Takayuki Mori (Kanazawa Institute of Technology)
  • Yoshiki Nakashima (Rapidus Corporation)
  • Tomoaki Nishimura (Hosei University)
  • Yasunori Oshima (KIOXIA Co., Ltd.)
  • Philippe Rodriguez (CEA-Leti)
  • Seiya Sakakura (Toshiba Electronic Devices & Storage Corporation)
  • Ryuichi Sugie (Toray Research Center, Inc.)
  • Nobuaki Takahashi (Sumitomo Heavy Industries, Ltd.)
  • Ryo Tanaka (Fuji Electric Co., Ltd.)
  • Noriaki Toyoda (University of Hyogo )
  • Masafumi Tsutsui (Tower Partners Semiconductor Co., Ltd.)
  • Tomoyuki Uchida (Toray Research Center, Inc.)
  • Yuya Uchida (Nissin Ion Equipment Co., Ltd.)
  • Anabela Veloso (imec)
  • Ryota Wada (Nissin Ion Equipment Co., Ltd.)
  • Hao Yu (imec)

    • International Committees

  • Chair: Kevin Jones (University of Florida, USA)

  • Jeff Boeker (Kingstone semiconductor Corp., China)
  • David Chen (Advanced Ion Beam Technology, Inc., Taiwan)
  • Paul Chu (City University of Hong Kong, Hong Kong)
  • Michael Current (Current Scientific, USA)
  • Susan Felch (Susan Felch Consulting, USA)
  • Nariaki Hamamoto (Nissin Ion Equipment Co., Ltd.)
  • Silke Hamm (Mattson Thermal Products GmbH, Germany)
  • Volker Häublein (Fraunhofer IISB, Germany)
  • Amitabh Jain (MicroSol Technologies Inc., USA)
  • Masataka Kase (Socionext Inc., Japan)
  • Yoji Kawasaki (Sumitomo Heavy Industries Ion Technology Co., Ltd., Japan)
  • Fareen Khaja (Vecco Inc., USA)
  • Larry Larson (Texas State University, USA)
  • Wen-Hsi Lee (National Cheng Kung University, Taiwan)
  • Wilfried Lerch (Skylark Solutions, Germany)
  • Jiro Matsuo (Kyoto University, Japan)
  • Dirk Mous (High Voltage Engineering Europa BV, Netherlands)
  • Lourdes Pelaz (University of Valladolid, Spain)
  • Deven Raj (Applied Materials Inc., USA)
  • Leonard Rubin (Axcelis Technologies Inc., USA)
  • Heiner Ryssel (Fraunhofer IISB, Germany)
  • Werner Schustereder (Infineon Technologies AG, Austria)
  • Mikio Takai (Osaka University (emeritus), Japan)
  • Aaron Vanderpool (Intel Corp., USA)
  • James Ziegler (U.S. Naval Academy (retired), USA)

    • Advisory Committee

  • Chair: Bunji Mizuno (UJT Lab.)

  • Isao Yamada (Kyoto University)
  • Mikio Takai (Osaka University (emeritus), Japan)

    • Local Arrangement Committee

  • Chair: Satoshi Shibata (Panasonic Operational Excellence Co., Ltd.)

  • Hitoshi Wakabayashi (Tokyo Institute of Technology)
  • Hisaki Izutani (Sumitomo Heavy Industries Ion Technology Co., Ltd.)
  • Tomoyuki Hatakeyama (Toyama Prefectural University)
  • Takayuki Mori (Kanazawa Institute of Technology)
  • Tomoaki Kyoden (National Institute of Technology, Toyama College)
  • Yasunari Hosoda (TPSCo)
  • Hiroshige Hirano (TPSCo)
  • Yoshiro Hirose (KOKUSAI ELECTRIC)
  • Akio Yamaguchi (KOKUSAI ELECTRIC)
  • Yoshio Hashimoto (Shinshu University)
  • Masahiro Nakano (Kanazawa University)
  • Go Okada (Kanazawa Institute of Technology)
  • Shigeki Naka (University of Toyama )
  • Sunao Shimizu (Toyama Prefectural University)
  • Masashi Akabori (Japan Advanced Institute of Science and Technology)
  • Masayuki Mori（University of Toyama）
  • Koichi Kaneshima (Toyama Convention Bureau)
  • Tsuyoshi Maruyama (Toyama Convention Bureau)

    • Secretariat

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